High-quality data transmission, high-precision information sensing, and high-sensitivity signal detection are important means to achieve precise perception and effective identification. High-performance chips, terahertz transmission T/R components, and extreme environment sensor manufacturing technologies have become key frontier research hotspots. Its effective implementation strongly depends on the ultra-precision micro-nano manufacturing level of the complex microstructure of core functional devices. As an excellent carrier for information-enabled core functional devices, pure copper metal has ultra-high electrical conductivity, thermal conductivity and high ductility, as well as low-loss signal transmission capabilities. Therefore, it has received extensive attention in the field of micro-nano manufacturing.